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Cantilever deflection sensitivity () calibration is a critical issue for a correct transduction of the electric signal into mechanical one in atomic force microscopy (AFM)-nanoindentation. Indenter-induced strains in calibration samples can negatively impact on thecalibration reliability, becoming more important as the cantilever deflection () set for this calibration process is increased. In this work, we present a systematic study regarding thesetpoint effects on thevalue calibration.setpoints between 0.05 and 1 [V] were considered for measurements, observing a clear decreasing trend in thevalue for0.125 [V] concerning the most accurate value192 [nm/V]. The results demonstrate that underestimations up to 10% concerning this value may be obtained by choosing non-adequatesetpoints. This study shows the relevance of thesetpoint for accuratecalibration, which is essential for reliable quantitative studies of mechanical properties.

instrumentation science and technology

Effects of nanometric plastic strain on the cantilever deflection sensitivity calibration accuracy for atomic force microscopy (AFM)-nanoindentation tests