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HfO 2 -based films prepared by the integration of the sol-gel method and spin-coating procedure were used as the study system to investigate the influence of La doping by varying the La contents of 20, 40, 50, and 60 wt%. GIXRD, XANES, and EXAFS measurements were performed to analyze phase formation, crystal structure, and local structure of the films. The XANES data of the Hf  L 3-edge show no significant difference with respect to an increase in La content, indicating a considerable stability of the hafnium ion in the +4 oxidation state. Moreover, the EXAFS spectrum shows that the coordination number of Hf 4+  is seven and the Hf–O bond length is ∼2.11 Å, which additionally confirms the formation of monoclinic HfO 2  structure. The contributions of the second coordination shells, which are assigned to the Hf–Hf and Hf–La bonds, become well-structured with increasing La concentration in the HfO 2  structure. However, the study suggests that the La-doped concentration affects the phase transformation from monoclinic to tetragonal and finally orthorhombic phase, leading to the presence of ferroelectric materials.

Effects of La Doping on Local Structure of Hafnium Oxide Studied by X-Ray Absorption Spectroscopy