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A-site Sr-substituted Pb(Zr 0.80 Ti 0.20 )O 3  composition (PSZT) with different Sr 2+  content in the range, 0.15 ≤  x  ≤ 0.20, and located near the AFE-FE phase boundary hold promise for microactuator applications. Thin films of PSZT with 1.0 µm thickness were fabricated on silicon substrates by chemical solution deposition by spin coating. The structure and texture of the thin films were determined through Raman spectral and XRD studies. We report, for the first time, the existence of the monoclinic phase in the AFE T -FE R  morphotropic phase boundary (MPB) compositions. Correlation of piezoelectric constant, e 31,f  of the thin films and their texture is also reported.

Piezoelectric Properties of {110}-Oriented A-Site Sr-Substituted Pb(Zr 0.80 Ti 0.20 )O 3 Thin Films