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In this study, the binding energies of 4-(acetyl amino)-2-aminobenzoic acid molecules that coated on the Indium Tin Oxide (ITO) surface with the self-assembled technique is measured by the XPS method. The thickness of the layer formed on the modified ITO surface is calculated by using XPS technique with an analytical approach. It is reported that the formation of commercially benzoic acid -based self-assembled monolayers (SAMs) is coated surely on ITO that is proved by this technique. According to this approach, the intensity of the substrate-originated photoemission peak from a semi-infinite substrate with a uniform over layer thickness, t XPS(SAM),  is obtained from the SAM peak to In3d and Sn3d oxide (ITO) intensity peaks ratio (I SAM /I ITO ) that the Hill equation allows thin film thickness calculation from XPS data.

Thickness Analyses of 4-(Acetyl Amino)-2-Aminobenzoic Acid on ITO Thin Film Using Analytic Based of X-Ray Photoelectron Spectroscopy Method