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Silicon dioxide thin films are a promising alternative to protective glass in solar cells. In this work, one-layer and four-layer thin films of a perhydropolysilazane (PHPS) were spin-coated from solution in dibutyl ether and cured by exposure to moderate temperatures or ultraviolet (UV) light to obtain glassy SiO x  layers. Optical and morphological properties as well as their long-term stability were studied using XPS, FTIR, UV-Vis spectroscopy, and SEM microscopy with EDX analysis. The results showed that the process of converting PHPS layers to SiO x  continues after the completion of the curing procedure for both methods. However, the composition of the thermally cured films is similar to silicon oxide, while the UV-cured samples demonstrate a composition similar to silicon dioxide due to differences in the reactions occurring during the curing process. The prolonged transformation process opens up possibilities for creating self-improving protective coatings based on PHPS.

Comparative study of perhydropolysilazane protective films