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YSZ coatings can prevent deleterious thermal effects on thermolabile alloys, however, a challenge is their deposition with a cubic phase at temperatures below 800 °C. In this work, PE-CVD was used to deposit ZrO 2  and YSZ coatings at ∼700 °C, by varying the evaporation temperature, the vol.% O 2 , and the substrate position. Our results showed that an evaporation temperature of 200 °C was needed to deposit ZrO 2  coatings. At 700 °C, the tetragonal phase was favoured regardless of the position within the heating zone. At 800 °C with a content of 20–60 vol.% O 2 , monoclinic and tetragonal structures were predominant, probably due to an increase in the crystallite size. When the ZrO 2  was dopped with Y 2 O 3 , a fully cubic structure of ZrO 2  was deposited.

Plasma enhanced chemical vapour deposition of ZrO 2 and YSZ coatings