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The present work is focused on the fabrication of VO 2 (B) thin films by magnetron sputtering followed by proton irradiation using 5 MeV tandem accelerator. For the study of phase transitions, the proton ion beam applied was to the VO 2 (B) thin films at the rate of 1 × 10 15  ions/cm 2 , 2 × 10 15  ions/cm 2 , 7.5 × 10 15  ions/cm 2 , 5 × 10 16  ions/cm 2  respectively. The VO 2 (B) thin-film shows prominent phase variation from VO 2 (B) to VO 2 (A) along with the amorphization phenomenon with the increasing doses of proton ions. The diffused reflectance spectroscopy shows increasing trends in reflectance from 20 to 39%. Energy bandgap was determined using a Tauc plot showing efficient decreasing trends w.r.t ion beam doses. Raman spectroscopy shows vibrations in the range from 144 to 883 cm −1  with different bands, confirming the phase transition towards VO 2 (A) by proton ion beam irradiation. The results are useful and promising for the smart use of various phases of VO 2 (B) thin film.

Influence of proton irradiation on phase variation and optical properties of VO 2 (B) thin film