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A cost-effective process for preparation of aluminum nitride was developed by using single-source precursor tris ( N,N  dimethylethylenediamine)AlCl 3 , which was prepared from anhydrous aluminum chloride and  N,N  dimethylethylenediamine (DMEDA) in 1:3 molar ratio at room temperature under N 2 . The pyrolysis of the precursor was carried out at various temperatures, pressures, and flow of gases (N 2  and Ar) to optimize parameters. The resultant pyrolyzed residues were investigated using various instrumental techniques. X-ray diffraction (XRD) showed that AlN crystallizes in mixed-phase (hexagonal/cubic) and the grain size was estimated to be in the range of 4–10 nm. The band gap of AlN was investigated by UV-Vis spectroscopy and found to be ∼5.7 eV (6.1 eV bulk); TEM showed agglomerated crystallites of AlN.

Structural and optical properties of aluminum nitride nano powder prepared from tris ( N,N dimethyl-ethylenediamine)AlCl 3 precursor