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This paper proposed a double-sided staggered conical teeth traveling wave rotating ultrasonic motor based on in-plane bending mode, which reduces the difficulty of rotor preload application and improves the output characteristics of in-plane bending mode traveling wave rotating ultrasonic motor. The motor has four sets of drive teeth alternately distributed on both the inner and outer sides of the vibrator, with the drive teeth gap dedicated to accommodate the piezoelectric ceramic piece, and the staggered drive teeth on both sides of the vibrator are used to drive the rotor rotation. The motor operates in two in-plane third-order bending modes with the same frequency and orthogonal to each other, and is excited by four sets of piezoelectric ceramic disks spaced 90 degrees apart from the inner and outer sides. After the prototype was completed, its vibration characteristics and output performance were experimentally tested, and the actual effects of the three excitation schemes were compared. The experimental results show that the motor can provide a maximum output torque of 1.82 N·mm and a maximum no-load speed of 96.4 rpm when the excitation voltage is 300 V and the excitation frequency is 20.60 kHz.

Design and experiment of a double-sided staggered conical teeth traveling wave ultrasonic motor