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Fe 2 O 3  nano particle were prepared by simple hydrothermal method and coated on IDT (inter dijital transduser) by spin coating for sensor measurement. The synthesized α-Fe 2 O 3  nano particles were characterized by XRD and SEM. XRD pattern and SEM micrographs for as-deposited thin film sample consists of pure hexagonal α-Fe 2 O 3  nano structure. The sensitivity, response time and recovery time of α-Fe 2 O 3  coated thin films were studied for different gases such as methanol, butanol, ethanol, IPA, benzene, xylene, and toluene. It is shown that Fe 2 O 3  based sensor obviously sensitive to toluene from other gases at room temperature.

α-Fe 2 O 3 thin film for toluene detection of highly sensitive and selective at room temperature