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ZnO and ZnO/ZnAlO heterojunction films with different concentrations were prepared on glass and silicon substrates by magnetron sputtering. The optical properties of ZnO thin films, such as transmittance, reflectivity, surface morphology and microstructure, were studied and analyzed by spectrophotometer, X-ray diffraction (XRD), scanning electron microscope (SEM) and spectrophotometer. The results show that the (101), (110), (103), (201) faces of the molecular structure of the films have the characteristics of preferential growth with the increase of Al doping concentration; The transmittance and reflectivity are blue shifted with the increase of different directions; In the ultraviolet region, the average transmittance of the refractive index is higher, and the effect of refraction is better; In the ultraviolet region, the peak position is higher .At the same time, there is a slight shift in the peak position.

Preparation and optical properties of ZnO and ZnO/ZnAlO heterojunction films by magnetron sputtering