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EuTiO3 (ETO) is a well-known complex oxide mainly investigated for itsmagnetic properties and its incipient ferro-electricity. In this work, wedemonstrate the realization of suspended micro-mechanical structures, such ascantilevers and micro-bridges, from 100 nm-thick single-crystal epitaxial ETOfilms deposited on top of SrTiO3(100) substrates. By combining profile analysisand resonance frequency measurements of these devices, we obtain the Young'smodulus, strain, and strain gradients of the ETO thin films. Moreover, weinvestigate the ETO anti-ferro-distorsive transition by temperature-dependentcharacterizations, which show a non-monotonic and hysteretic mechanicalresponse. Comparison between experimental and literature data allows us toweight the contribution from thermal expansion and softening to the tuningslope, while a full understanding of the origin of such a wide hysteresis isstill missing. We also discuss the influence of oxygen vacancies on thereported mechanical properties by comparing stoichiometric and oxygen-deficientsamples.

Strain, Young's modulus, and structural transition of EuTiO3 thin films probed by micro-mechanical methods