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The quantum excitations of macroscopic surface acoustic waves (SAWs) havebeen tailored to control, communicate and transduce stationary and flyingquantum states. However, the limited lifetime of this hybrid quantum systemsremains critical obstacles to extend their applications in quantum informationprocessing. Here we present the potentials of thin film aluminum nitride toon-chip integrate phonons with superconducting qubits over previous bulkpiezoelectric substrates. We have reported high-quality thin film GHz-SAWresonators with the highest internal quality factor Qi of 5 e4 at thesingle-phonon level. The internal loss of SAW resonators are systematicallyinvestigated with tuning the parameters of sample layout, power andtemperature. Our results manifest that SAWs on piezoelectric films are readilyintegrable with standard fabrication of Josephson junction quantum circuits,and offer excellent acoustic platforms for the high-coherence quantumacoustodynamics architectures.

Thin film aluminum nitride surface acoustic wave resonators for quantum acoustodynamics