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In this work, we report a confocal laser induced fluorescence (LIF)configuration, which allows for high spatial resolution measurements of plasmaproperties in plasma setups and sources with a limited optical access. Theproposed LIF configuration utilizes a ring-shaped laser beam generated by apair of diffractive axicons. LIF signal is collected along the main opticalaxis within the ring region. It is shown experimentally that at the focaldistance of 300 mm, the spatial resolution of approximately 5.3 mm can beachieved. More than that, theoretical estimations predict the possibility ofachieving ~1 mm resolution at the same focal distance by adjusting laser beamparameters. This is approaching the localization accuracy of conventional LIFcollection methods (with crossing laser beam injection and fluorescencecollection optical paths). Measurements of the ion velocity distributionfunction in an argon plasma using both the confocal LIF with ring shaped laserbeam and conventional LIF demonstrate a satisfactory agreement. The proposedLIF setup has potential applications for diagnostics in various plasmaprocessing equipment, and plasma sources such as hollow cathodes, microplasmas,electric propulsion, etc.

A confocal laser-induced fluorescence diagnostic with a ring-shaped laser beam