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Quantum hardware based on circuit quantum electrodynamics makes extensive useof airbridges to suppress unwanted modes of wave propagation incoplanar-waveguide transmission lines. Airbridges also provide an interconnectenabling transmission lines to cross. Traditional airbridge fabricationproduces a curved profile by reflowing resist at elevated temperature prior tometallization. The elevated temperature can affect the coupling energy and evenyield of pre-fabricated Josephson elements of superconducting qubits, tuneablecouplers and resonators. We employ grayscale lithography in place of reflow toreduce the peak airbridge processing temperature from $200$ to$150^\circ\mathrm{C}$, showing a substantial yield increase of transmon qubitswith Josephson elements realized using Al-contacted InAs nanowires.

Lower-temperature fabrication of airbridges by grayscale lithography to increase yield of nanowire transmons in circuit QED quantum processors