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Exciton polaritons in atomically-thin transition metal dichalcogenidecrystals (monolayer TMDCs) have emerged as a promising candidate to enabletopological transport, ultra-efficient laser technologies, and collectivequantum phenomena such as polariton condensation and superfluidity at roomtemperature. However, integrating monolayer TMDCs into high-quality planarmicrocavities to achieve the required strong coupling between the cavityphotons and the TMDC excitons (bound electron-hole pairs) has provenchallenging. Previous approaches to integration had to compromise betweenvarious adverse effects on the strength of light-matter interactions in themonolayer, the cavity photon lifetime, and the lateral size of the microcavity.Here, we demonstrate a scalable approach to fabricating high-quality planarmicrocavities with an integrated monolayer WS$_2$ layer-by-layer by usingpolymethyl methacrylate/silicon oxide (PMMA/SiO$_x$) as a cavity spacer.Because the exciton oscillator strength is well protected against the requiredprocessing steps by the PMMA layer, the microcavities investigated in thiswork, which have quality factors of above $10^3$, can operate in the stronglight-matter coupling regime at room temperature. This is an important steptowards fabricating wafer-scale and patterned microcavities for engineering theexciton-polariton potential landscape, which is essential for enabling manyproposed technologies.

Fabrication of high-quality PMMA/SiO$_x$ spaced planar microcavities for strong coupling of light with monolayer WS$_2$ excitons