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A detailed investigation of the structural and vibrational properties ofvarious prestressed silicon nitride membranes patterned with one-dimensionalphotonic crystal structures is presented. The tensile stress-relateddeformation of the structure in the vicinity of the patterned area isdetermined by Atomic Force Microscopy scans, while the resonance frequenciesand quality factors of the out-of-plane membrane vibrations are measured usingoptical interferometry. We show that these noninvasive measurements, combinedwith results of finite element simulations, provide accurate knowledge on thetensile stress, the elasticity modulus and the density of these nanostructuredthin films. The obtained results are interesting in two ways: first, they showthat such highly reflective thin membranes already exploited in variousphotonics applications possess high-mechanical quality, which also makes themattractive for optomechanics and sensing applications. Second, they represent anondestructive method to determine key material parameters which can beapplicable to a broad range of fragile nanostructured thin films.

Mechanical investigations of free-standing SiN membranes patterned with one-dimensional photonic crystal structures