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Angle-resolved photoemission spectroscopy using a micro-focused beam spot(micro-ARPES) is becoming a powerful tool to elucidate key electronic states ofexotic quantum materials. We have developed a versatile micro-ARPES systembased on synchrotron radiation beam focused with a Kirkpatrick-Baez mirroroptics. The mirrors are monolithically installed on a stage, which is drivenwith five-axes motion, and are vibrationally separated from the ARPESmeasurement system. Spatial mapping of the Auphotolithography pattern on Sisignifies the beam spot size of 10 $\mu$m (horizontal) x 12 $\mu$m (vertical)at the sample position, which is well suited to resolve the fine structure inlocal electronic states. Utilization of the micro beam and the high precisionsample motion system enables the accurate spatially resolved band-structuremapping, as demonstrated by the observation of a small band anomaly associatedwith tiny sample bending near the edge of a cleaved topological insulatorsingle crystal.

Development of a versatile micro-focused angle-resolved photoemission spectroscopy system with Kirkpatrick-Baez mirror optics