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We report on the development and demonstration of a MHz frequency domainmultiplexing (FDM) technology to read out arrays of cryogenic transition edgesensor (TES) X-ray microcalorimeters. In our FDM scheme, TESs are AC-biased atdifferent resonant frequencies in the low MHz range through an array ofhigh-$Q$ LC resonators. The current signals of all TESs are summed atsuperconducting quantum interference devices (SQUIDs). We have demonstratedmultiplexing for a readout of 31 pixels using room temperature electronics,high-$Q$ LC filters and TES arrays developed at SRON, and SQUID arrays fromVTT. We repeated this on a second setup with 37 pixels. The summed X-rayspectral resolutions $@$ 5.9 keV are $\Delta E_{\rm 31 pix ~MUX}=2.14\pm0.03$eV and $\Delta E_{\rm 37 pix ~MUX}=2.23\pm0.03$ eV. The demonstrated resultsare comparable with other multiplexing approaches. There is potential tofurther improve the spectral resolution and to increase the number ofmultiplexed TESs, and to open up applications for TES X-ray microcalorimeters.

Demonstration of MHz frequency domain multiplexing readout of 37 transition edge sensors for high-resolution x-ray imaging spectrometers