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We present a table-top extreme ultraviolet (XUV) beamline for measuring time-and frequency-resolved XUV excited optical luminescence (XEOL) with additionalfemtosecond-resolution XUV transient absorption spectroscopy functionality. XUVpulses are generated via high-harmonic generation using a near-infrared pulsein a noble gas medium, and focused to excite luminescence from a solid sample.The luminescence is collimated and guided into a streak camera, where itsspectral components are temporally resolved with picosecond temporalresolution. We time-resolve XUV excited luminescence and compare the results toluminescence decays excited at longer wavelengths for three different materials: (i) sodium salicylate, an often used XUV scintillator, (ii) fluorescentlabeling molecule 4-carbazole benzoic acid (CB), and (iii) a zirconium metaloxo-cluster labeled with CB, which is a photoresist candidate forextreme-ultraviolet lithography. Our results establish time-resolved XEOL as anew technique to measure transient XUV-driven phenomena in solid-state samples,and identify decay mechanisms of molecules following XUV and soft-X-rayexcitation.

Extreme Ultraviolet-Excited Time-Resolved Luminescence Spectroscopy Using an Ultrafast Table-Top High-Harmonic Generation Source