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The increasing availability of a variety of two-dimensional materials hasgenerated enormous growth in the field of nanoengineering and nanomechanics.Recent developments in thin film synthesis have enabled the fabrication offreestanding functional oxide membranes that can be readily incorporated innanomechanical devices. While many oxides are extremely brittle in bulk, recentstudies have shown that, in thin membrane form, they can be much more robust tofracture as compared to their bulk counterparts. Here, we investigate theultimate tensile strength of SrTiO$_3$ membranes by probing freestandingSrTiO$_3$ drumheads using an atomic force microscope. We demonstrate thatSrTiO$_3$ membranes can withstand an elastic deformation with an average strainof ~6% in the sub-20 nm thickness regime, which is more than an order ofmagnitude beyond the bulk limit. We also show that these membranes are highlyresilient upon a high cycle fatigue test, surviving up to a billion cycles offorce modulation at 85% of their fracture strain, demonstrating their highpotential for use in nanomechanical applications.

Fracture and Fatigue of Thin Crystalline SrTiO$_3$ Membranes