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One of the advantages of kinetic inductance detectors is their intrinsicfrequency domain multiplexing capability. However, fabrication imperfectionsusually give rise to resonance frequency deviations, which create frequencycollision and limit the array yield. Here we study the resonance frequencydeviation of a 4-inch kilo-pixel lumped-element kinetic inductance detector(LEKID) array using optical mapping. Using the measured resonator dimensionsand film thickness, the fractional deviation can be explained within $\pm25\times 10^{-3}$, whereas the residual deviation is due to variation ofelectric film properties. Using the capacitor trimming technique, thefractional deviation is decreased by a factor of 14. The yield of the trimmingprocess is found to be 97%. The mapping yield, measured under a 110~Kbackground, is improved from 69% to 76%, which can be further improved to 81%after updating our readout system. With the improvement in yield, the capacitortrimming technique may benefit future large-format LEKID arrays.

Understanding and minimizing resonance frequency deviations on a 4-inch kilo-pixel kinetic inductance detector array