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We report on the first demonstration of fluorescence detection usingsingle-photon avalanche photodiodes (SPADs) monolithically integrated with amicrofabricated surface ion trap. The SPADs are positioned below the trappingpositions of the ions, and designed to detect 370 nm photons emitted fromsingle $^{174}$Yb$^+$ and $^{171}$Yb$^+$ ions. We achieve an ion/no-iondetection fidelity for $^{174}$Yb$^+$ of 0.99 with an average detection windowof 7.7(1) ms. We report a dark count rate as low as 1.2 kHz at room temperatureoperation. The fidelity is limited by laser scatter, dark counts, and heatingthat prevents holding the ion directly above the SPAD. We measure count ratesfrom each of the contributing sources and fluorescence as a function of ionposition. Based on the active detector area and using the ion as a calibratedlight source we estimate a SPAD quantum efficiency of 24$\pm$1%.

Fluorescence Detection of a Trapped Ion with a Monolithically Integrated Single-Photon-Counting Avalanche Diode