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The first epitaxial ferroelectric wurtzite film with clearpolarization-electric field hysteresis behavior is presented. The coercivefield of this epitaxial Al0.7Sc0.3N film on W/c-sapphire substrate is 0.4 +-0.3 MV cm-1 (8 %) smaller than that of a conventional fiber textured film on aPt/TiOx/SiO2/Si substrate, attributed to the 0.01 +- 0.007 {\AA} smaller c-axislattice parameter in the epitaxial film. The strain and decrease of thecoercive field most likely originate from epitaxial strain rather than themismatch in thermal coefficient of expansion. These results provide an insightfor further coercive field reduction of novel wurtzite ferroelectrics usingepitaxial mismatch strain.

Reduced Coercive Field in Epitaxial Thin Film of Ferroelectric Wurtzite Al0.7Sc0.3N