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We investigate the performance of niobium nitride superconducting coplanarwaveguide resonators towards hybrid quantum devices with magnon-photoncoupling. We find internal quality factors ~ 20000 at 20 mK base temperature,in zero magnetic field. We find that by reducing film thickness below 100 nminternal quality factor greater than 1000 can be maintained up to parallelmagnetic field of ~ 1 T and perpendicular magnetic field of ~ 100 mT. Wefurther demonstrate strong coupling of microwave photons in these resonators,with magnons in chromium trichloride, a van der Waals antiferromagnet, whichshows that these cavities serve as a good platform for studying magnon-photoncoupling in 2D magnonics based hybrid quantum systems. We demonstrate strongmagnon-photon coupling for both optical and acoustic magnon modes of anantiferromagnet.

Coplanar cavity for strong coupling between photons and magnons in van der Waals antiferromagnet