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We use the one-dimensional object-oriented particle-in-cell Monte Carlocollision code oopd1 to explore the properties and the origins of both theelectric field and electron power absorption within the plasma bulk for acapacitively coupled oxygen discharge operated at 10 and 100 mTorr for 45 mm ofgap distance. The properties of the electric field at three different timeslices as well as time averaged have been explored considering the moments ofthe Boltzmann equation. The electron power absorption is distinctly differentat these operating pressures. The most relevant contributions to the electricfield at different time steps come from the pressure terms, the ambipolar andthe electron temperature gradient terms, along with the ohmic term. The sameapplies for the electron power absorption. At both 10 and 100 mTorr therelative ohmic contribution to the electron power absorption remains roughlythe same, while the ambipolar term contributes to power absorption and thetemperature gradient term to electron cooling at 100 mTorr, and the oppositeapplies at 10 mTorr. At 100 mTorr the discharge is weekly electronegative, andelectron power absorption is mainly due to sheath expansion while at 10 mTorrit is strongly electronegative, and the electron power absorption occurs mainlywithin the electronegative core and drift-ambipolar mode dominates. Theagreement between the calculated values and the simulations is good for boththe electric field and the electron power absorption within the plasma bulk andin the collapsed sheath region for all the cases considered.

Electron power absorption dynamics in a low pressure radio frequency driven capacitively coupled discharge in oxygen