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Nanomechanical silicon nitride (SiN) drum resonators are currently employedin various fields of applications that arise from their unprecedented frequencyresponse to physical quantities. In the present study, we investigate thethermal transport in nanomechanical SiN drum resonators by analyticalmodelling, computational simulations, and experiments for a betterunderstanding of the underlying heat transfer mechanism causing the thermalfrequency response. Our analysis indicates that radiative heat loss is anon-negligible heat transfer mechanism in nanomechanical SiN resonatorslimiting their thermal responsivity and response time. This finding isimportant for optimal resonator designs for thermal sensing applications aswell as cavity optomechanics.

Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators