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Laser enhanced field evaporation of surface atoms in Laser-assisted AtomProbe Tomography (La-APT) can simultaneously excite phtotoluminescence insemiconductor or insulating specimens. An atom probe equipped with appropriatefocalization and collection optics has been coupled with an in-situmicro-Photoluminescence ({\mu}PL) bench that can be operated during APTanalysis. The Photonic Atom Probe instrument we have developped operates atfrequencies up to 500 kHz and is controlled by 150 fs laser pulses tunable inenergy in a large spectral range (spanning from deep UV to near IR). Micro-PLspectroscopy is performed using a 320 mm focal length spectrometer equippedwith a CCD camera for time-integrated and with a streak camera fortime-resolved acquisitions. An exemple of application of this instrument on amulti-quantum well oxide heterostructure sample illustrates the potential ofthis new generation of tomographic atom probe.

A Photonic Atom Probe coupling 3D Atomic Scale Analysis with in situ Photoluminescence Spectroscopy