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Many modern nanofabrication and imaging techniques require an ultra-quietenvironment to reach optimal resolution. Isolation from ambient vibrations isoften achieved by placing the sensitive instrument atop a massive block thatfloats on air springs and is surrounded by acoustic barriers. Because typicalbuilding noise drops off above 120 Hz, it is advantageous to raise the flexuralresonance frequencies of the inertia block and instrument far above 120 Hz.However, it can be challenging to obtain a high fundamental frequency of thefloating block using a simple rectangular design. Here we design, construct,and characterize a vibration isolation system with a cylindrical inertia block,whose lowest resonance frequency of 249 Hz shows good agreement between finiteelement analysis simulation and directly measured modes. Our simulations showthat a cylindrical design can achieve higher fundamental resonance frequencythan a rectangular design of the same mass.

Design and characterization of a low-vibration laboratory with cylindrical inertia block geometry