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Hydrogenated microcrystalline Silicon (μc-Si:H) produced by the VHF-GD (Very High Frequency Glow Discharge) process can be considered to be a new base material for thin-film crystalline silicon solar cells. The most striking feature of such cells, in contrast to conventional amorphous silicon technology, is their stability under light - soaking. With respect to crystalline silicon technology, their most striking advantage is their low process temperature (220°C). The so called "micromorph" cell contains such a μc-Si:H based cell as bottom cell, whereas the top-cell consists of amorphous silicon. A stable efficiency of 10.7% (confirmed by ISE Freiburg) is reported in this paper. At present, all solar cell concepts based on thin-film crystalline silicon have a common problem to overcome: namely, too long manufacturing times. In order to help in solving this problem for the particular case of plasma-deposi ted μc-Si:H, results on combined argon /hydrogen dilution of the feedgas (silane) are presented. It is shown that rates as high as 9.4 Å/s can be obtained; furthermore, a first solar cell deposited with 8.7 Å/s resulted in an efficiency of 3.1%.

The “Micromorph” cell: a new way to high-efficiency-low-temperature crystalline silicon thin-film cell manufacturing?