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Dielectric measurements on insulating materials at cryogenic temperatures canbe challenging, depending on the frequency and temperature ranges of interest.We present a technique to study the dielectric properties of bulk dielectricsat GHz frequencies. A superconducting coplanar Nb resonator is depositeddirectly on the material of interest, and this resonator is then probed indistant-flip-chip geometry with a microwave feedline on a separate chip.Evaluating several harmonics of the resonator gives access to various probingfrequencies, in the present studies up to 20 GHz. We demonstrate the techniqueon three different materials (MgO, LaAlO3, and TiO2), at temperatures between1.4 K and 7 K.

Microwave probing of bulk dielectrics using superconducting coplanar resonators in distant-flip-chip geometry