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We have realized a microstrip based THz near field cantilever which enablesquantitative measurements of the impedance of the probe tip at THz frequencies(0.3 THz). A key feature is the on-chip balanced hybrid coupler which serves asan interferometer for passive signal cancellation to increase the readoutcircuit sensitivity despite extreme impedance mismatch at the tip. We observedistinct changes in the reflection coefficient of the tip when brought intocontact with different dielectric (Si, SrTiO3) and metallic samples (Au). Bycomparing to finite element simulations we determine the sensitivity of our THzprobe to be well below 0.25 fF. The cantilever further allows for topographyimaging in a conventional atomic force microscope mode. Our THz cantileverremoves several critical technology challenges and thus enables a shieldedcantilever based THz near field microscope.

Shielded cantilever with on-chip interferometer circuit for THz scanning probe impedance microscopy