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Recent progress in the development of superconducting nanowire single-photondetectors (SNSPDs) has delivered excellent performances, and has had a greatimpact on a range of research fields. The timing jitter, which denotes thetemporal resolution of the detection, is a crucial parameter for manyapplications. Despite extensive work since their apparition, the lowest jitterachievable with SNSPDs is still not clear, and the origin of the intrinsiclimits is not fully understood. Understanding its intrinsic behaviour andlimits is a mandatory step toward improvements. Here, we report ourexperimental study on the intrinsically-limited timing jitter in molybdenumsilicide (MoSi) SNSPDs. We show that to reach intrinsic jitter, severaldetector properties such as the latching current and the kinetic inductance ofthe devices have to be understood. The dependence on the nanowire cross-sectionand the energy dependence of the intrinsic jitter are exhibited, and the originof the limits are explicited. System timing jitter of 6.0 ps at 532 nm and 10.6ps at 1550 nm photon wavelength have been obtained.

Intrinsically-limited timing jitter in molybdenum silicide superconducting nanowire single-photon detectors