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Particle-in-Cell/Monte Carlo Collision simulations are performed to investigate the effects of heavy-particle induced secondary electrons (SEs) on the ionization dynamics and on the control of ion properties at the electrodes in geometrically symmetric capacitively coupled argon discharges driven by tailored voltage waveforms. The driving voltage waveform is composed of a maximum of four ( 1≤N≤4) consecutive harmonics of the fundamental frequency of 13.56 MHz and is tailored by adjusting the identical phases of the even harmonics, θ. The simulations are carried out at neutral gas pressures of 3 Pa (nearly collisionless low-pressure regime) and 100 Pa (collisional high-pressure regime). Different approaches are used in the simulations to describe the secondary electron emission (SEE) at the electrodes: we adopt (i) constant ion-induced secondary electron emission coefficients (SEECs), γ, and (ii) realistic, energy-dependent SE yields for ions and fast neutrals. The mean ion energy at the electrodes, ⟨Ei⟩, ...

Heavy-particle induced secondary electrons in capacitive radio frequency discharges driven by tailored voltage waveforms