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We have designed and characterized a micro-SQUID with dispersive readout foruse in low temperature scanning probe microscopy systems. The design features acapacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12GHz, micrometer spatial resolution and integrated superconducting coils forlocal application of magnetic fields. The SQUID is operated as a nonlinearoscillator with a flux- and power-dependent resonance frequency. Measurementsfor device characterization and noise benchmarking were carried out at 4 K. Themeasured flux noise above 10 kHz at 4 K is $80\;\mathrm{n}\Phi_0\mathrm{Hz}^{-1/2}$ at a bandwidth of 200 MHz. Estimations suggest that one canbenefit from parametric gain based on inherent nonlinearity of the Josephsonjunction and reduce the flux noise to $30\;\mathrm{n}\Phi_0\mathrm{Hz}^{-1/2}$at 100 mK, which corresponds to $7.5\;\mathrm{\mu_B Hz^{-1/2}}$ for a magneticmoment located at the center of the pickup loop.

A micro-SQUID with dispersive readout for magnetic scanning microscopy