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An electro-optomechanical device capable of microwave-to-optics conversionhas recently been demonstrated, with the vision of enabling optical networks ofsuperconducting qubits. Here we present an improved converter design that usesa three-dimensional (3D) microwave cavity for coupling between the microwavetransmission line and an integrated LC resonator on the converter chip. The newdesign simplifies the optical assembly and decouples it from the microwave partof the setup. Experimental demonstrations show that the modular device assemblyallows us to flexibly tune the microwave coupling to the converter chip whilemaintaining small loss. We also find that electromechanical experiments are notimpacted by the additional microwave cavity. Our design is compatible with ahigh-finesse optical cavity and will improve optical performance.

Reconfigurable re-entrant cavity for wireless coupling to an electro-optomechanical device