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We demonstrate photon counting at 1550 nm wavelength using microwave kineticinductance detectors (MKIDs) made from TiN/Ti/TiN trilayer films withsuperconducting transition temperature Tc ~ 1.4 K. The detectors have alumped-element design with a large interdigitated capacitor (IDC) covered byaluminum and inductive photon absorbers whose volume ranges from 0.4 um^3 to 20um^3. We find that the energy resolution improves as the absorber volume isreduced. We have achieved an energy resolution of 0.22 eV and resolved up to 7photons per pulse, both greatly improved from previously reported results at1550 nm wavelength using MKIDs. Further improvements are possible by optimizingthe optical coupling to maximize photon absorption into the inductive absorber.

Counting Near Infrared Photons with Microwave Kinetic Inductance Detectors