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In this paper strain transfer efficiencies from single crystallinepiezoelectric lead magnesium niobate-lead titanate (PMN-PT) substrate to a GaAssemiconductor membrane bonded on top are investigated using state-of-the-artx-ray diffraction (XRD) techniques and finite-element-method (FEM) simulations.Two different bonding techniques are studied, namely gold-thermo-compressionand polymer-based SU8 bonding. Our results show a much higher strain-transferfor the "soft" SU8 bonding in comparison to the "hard" bonding viagold-thermo-compression. A comparison between the XRD results and FEMsimulations allows to explain this unexpected result with the presence ofcomplex interface structures between the different layers.

Comparison of different bonding techniques for efficient strain transfer using piezoelectric actuators