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Free electron beams that carry high values of orbital angular momentum (OAM)possess large magnetic moments along the propagation direction. This makes theman ideal probe for measuring the electronic and magnetic properties ofmaterials, and for fundamental experiments in magnetism. However, theirgeneration requires the use of complex diffractive elements, which usually takethe form of nano-fabricated holograms. Here, we show how the limitations offocused ion beam milling in the fabrication of such holograms can be overcomeby using electron beam lithography. We demonstrate experimentally therealization of an electron vortex beam with the largest OAM value that has yetbeen reported (L = 1000h\bar), paving the way for even more demandingdemonstrations and applications of electron beam shaping.

Realization of electron vortices with large orbital angular momentum using miniature holograms fabricated by electron beam lithography