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Based on the cross correlation analysis of the Kikuchi diffraction patternshigh-resolution EBSD is a well established method to determine the internalstress in deformed crystalline materials. In many cases, however, the stressvalues obtained at the different scanning points have a large (in the order ofGPa) scatter. As it was first demonstrated by Wilkinson and co-workers this isdue to the long tail of the probability distribution of the internal stress($P(\sigma)$) generated by the dislocations present in the system. According tothe theoretical investigations of Groma and co-workers the tail of $P(\sigma)$is inverse cubic with prefactor proportional to the total dislocation density$<\rho>$. In this paper we present a direct comparison of the X-ray linebroadening and $P(\sigma)$ obtained by EBSD on deformed Cu single crystals. Itis shown that $<\rho>$ can be determined from $P(\sigma)$. This opens newperspectives for the application of EBSD in determining mesoscale parameters ina heterogeneous sample.

Comparison of the dislocation density obtained by HR-EBSD and X-ray profile analysis