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The local atomic structure of a crystalline sample aligned along a zone axis can be probed with a focused electron probe, which produces a convergent beam electron diffraction pattern. The introduction of high speed direct electron detectors has allowed for experiments that can record a full diffraction pattern image at thousands of probe positions on a sample. By incoherently summing these patterns over crystalline unit cells, we demonstrate that in addition to crystal structure and thickness, we can also estimate the local composition of a perovskite superlattice sample. This is achieved by matching the summed patterns to a library of simulated diffraction patterns. This technique allows for atomic-scale chemical measurements without requiring a spectrometer or hardware aberration correction

Non-spectroscopic composition measurements of SrTiO3-La0.7Sr0.3MnO3 multilayers using scanning convergent beam electron diffraction