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This paper presents an innovative nano strain-amplifier employed tosignificantly enhance the sensitivity of piezoresistive strain sensors.Inspired from the dogbone structure, the nano strain-amplifier consists of anano thin frame released from the substrate, where nanowires were formed at thecentre of the frame. Analytical and numerical results indicated that a nanostrain-amplifier significantly increases the strain induced into a freestanding nanowire, resulting in a large change in their electrical conductance.The proposed structure was demonstrated in p-type cubic silicon carbidenanowires fabricated using a top down process. The experimental data showedthat the nano strain-amplifier can enhance the sensitivity of SiC strainsensors at least 5.4 times larger than that of the conventional structures.This result indicates the potential of the proposed strain-amplifier forultra-sensitive mechanical sensing applications.

Nano strain-amplifier: making ultra-sensitive piezoresistance in nanowires possible without the need of quantum and surface charge effects