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We modify the theory of nanoscale patterns produced by ion bombardment withconcurrent impurity deposition to take into account the effect that thenear-surface impurities have on the collision cascades. As the impurityconcentration is increased, the resulting theory successively yields a flatsurface, a rippled surface with its wavevector along the projected direction ofion incidence, and a rippled surface with its wavevector rotated by 90 degrees.Exactly the same morphological transitions were observed in recent experimentsin which silicon was bombarded with an argon ion beam and gold was co-deposited[B.~Moon et al. arXiv:1601.02534 (2016)].

Morphological Transitions in Nanoscale Patterns Produced by Concurrent Ion Sputtering and Impurity Co-deposition