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Rare-earth ions doped into desired locations of optical crystals might enablea range of novel integrated photonic devices for quantum applications. Withthis aim, we have investigated the production yield of cerium and praseodymiumby means of ion implantation. As a measure, the collected fluorescenceintensity from both, implanted samples and single centers was used. With atailored annealing procedure for cerium, a yield up to 53% was estimated.Praseodymium yield amounts up to 91%.

Production yield of rare-earth ions implanted into an optical crystal