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The shape of a droplet moving on a solid substrate is largely determined by the mobility of its contact line. Above a certain critical velocity, the droplet typically disintegrates and leaves residual liquid behind. We studied experimentally how localized infrared laserillumination can stabilize it against the progressive loss of liquid. We systematically varied the substrate velocity, the laser power, and the laser spot position and found that the critical velocity of the droplet can be substantially increased. These results are potentially important for increasing throughput in immersion lithography systems.

Enhancement of contact line mobility by means of infrared laser illumination. I. Experiments