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We present a combined study with conventional far-infrared and time-domainterahertz ellipsometry of the temperature dependent optical response of SrTiO3thin films (85 and 8.5 nm) that are grown by pulsed-laser deposition on LSATsubstrates. We demonstrate that terahertz ellipsometry is very sensitive to theoptical response of these thin films, in particular, to the soft mode ofSrTiO3. We show that for the 85 nm film the eigenfrequency of the soft mode isstrongly reduced by annealing at 1200 C, whereas for the 8.5 nm film it ishardy affected. For the latter, after annealing the mode remains at 125 cm-1 at300 K and exhibits only a weak softening to about 90 cm-1 at 10 K. Thissuggests that this ultrathin film undergoes hardly any relaxation of thecompressive strain due to the LSAT substrate.

Terahertz ellipsometry study of the soft mode behavior in ultrathin SrTiO3 films