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The relationship between Balmer-α and Fulcher-band emissions with extracted H(+), H2(+), and H3(+) ions is demonstrated for a 2.45 GHz microwave discharge. Ion mass spectra and optical measurements of Balmer-α and Fulcher-band emissions have been obtained with a Wien Filter having an optical view-port on the plasma chamber axis. The beam of approximately 1 mA is analyzed for different plasma conditions simultaneously with the measurement of light emissions both with temporal resolution. The use of visible light emissions as a valuable diagnostic tool for monitoring the species fraction of the extracted beams is proposed.

The relationship between visible light emission and species fraction of the hydrogen ion beams extracted from 2.45 GHz microwave discharge