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Here we report the fabrication of stable, shallow (< 5 nm) nitrogen-vacancy(NV) centers in diamond by nitrogen delta doping at the last stage of thechemical vapor deposition (CVD) growth process. The NVs are stabilized aftertreating the diamond in $SF_6$ plasma, otherwise the color centers are notobserved, suggesting a strong influence from the surface. X-Ray photoelectronspectroscopy measurements show the presence of only fluorine atoms on thesurface, in contrast to previous studies, and suggests very good surfacecoverage. We managed to detect hydrogen nuclear magnetic resonance signal fromprotons in the immersion oil, revealing a depth of the NVs of about 5 nm

Stabilizing shallow color centers in diamond created by nitrogen delta-doping using SF$_6$ plasma treatment