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Using a relaxation oscillator circuit, breakdown ($V_{\mathrm{BD}}$) andquench ($V_{\mathrm{Q}}$) voltages of a DC discharge microplasma between twoneedle probes are measured. High resolution modified Paschen curves areobtained for argon microplasmas including a quench voltage curve representingthe voltage at which the plasma turns off. It is shown that, for a point topoint microgap (e.g. the microgap between two needle probes) which describesmany realistic microdevices, neither Paschen's law applies nor field emissionis noticeable. Although normally $V_{\mathrm{BD}}>V_{\mathrm{Q}}$, it isobserved that depending on environmental parameters of argon, such as pressureand the driving circuitry, plasma can exist in a different state with equal$V_{\mathrm{BD}}$ and $V_{\mathrm{Q}}$. Using emission line spectroscopy, it isshown that $V_{\mathrm{BD}}$ and $V_{\mathrm{Q}}$ are equal if the atomicexcitation by the electric field dipole moment dominantly leads to one of theargon's metastable states ($4P_{5}$ in our study).

On the difference between breakdown and quench voltages of argon plasma and its relation to $4p-4s$ atomic state transitions