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Understanding the complex properties of electronic and spintronic devices atthe micro- and nano-scale is a topic of intense current interest as it becomesincreasingly important for scientific progress and technological applications.In-operando characterization of such devices by scanned probe techniques isparticularly well-suited for the microscopic study of these properties. We havedeveloped a scanned probe microscope (SPM) which is capable of both standardforce imaging (atomic, magnetic, electrostatic) and simultaneous electricaltransport measurements. We utilize flexible and inexpensive FPGA (fieldprogrammable gate array) hardware and a custom software framework developed inNational Instrument's LabVIEW environment to perform the various aspects ofmicroscope operation and device measurement. The FPGA-based approach enablessensitive, real-time cantilever frequency-shift detection. Using this system,we demonstrate electrostatic force microscopy of an electrically-biasedgraphene FET device. The combination of SPM and electrical transport alsoenables imaging of the transport response to a localized perturbation providedby the scanned cantilever tip. Facilitated by the broad presence of LabVIEW inthe experimental sciences and the openness of our software solution, our systempermits a wide variety of combined scanning and transport measurements byproviding standardized interfaces and flexible access to all aspects of ameasurement (input and output signals, and processed data). Our system alsoenables precise control of timing (synchronization of scanning and transportoperations) and implementation of sophisticated feedback protocols, and thusshould be broadly interesting and useful to practitioners in the field.

A versatile LabVIEW and FPGA-based scanned probe microscope for in-operando electronic device characterization